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2 article(s) from Thorman, Rachel M.

Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂

Aya Mahgoub,
Hang Lu,
Rachel M. Thorman,
Konstantin Preradovic,
Titel Jurca,
Lisa McElwee-White,
Howard Fairbrother and
Cornelis W. Hagen

Beilstein J. Nanotechnol. 2020, 11, 1789–1800, doi:10.3762/bjnano.11.161

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Figure 1: Thermogravimetric analysis (TGA) and 1st derivative DTG of (a) Pt(CO)₂Cl₂ and (b) Pt(CO)₂Br₂.

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Figure 2: Isothermal TGA traces plotted as a function of temperature and time for (a,b) Pt(CO)₂Cl₂ and (c,d) ...

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Figure 3: Chamber pressure after opening and closing the GIS valve containing a) Pt(CO)₂Cl₂ and b) MeCpPtMe₃.

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Figure 4: Pillars deposited at 38 pA. a) 35° tilt image of pillars deposited from top to bottom and from left...

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Figure 5: Pillar height a) and volume b) as functions of the electron dose (total number of incident electron...

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Figure 6: Comparison of pillars grown in experiment 2 from all three precursors a) and d) MeCpPtMe₃, b) and e...

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Figure 7: Pillar height a) and volume b) as functions of the number of electrons deposited at 38 pA from MeCp...

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Full Research Paper

Published 27 Nov 2020

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The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Rachel M. Thorman,
Ragesh Kumar T. P.,
D. Howard Fairbrother and
Oddur Ingólfsson

Beilstein J. Nanotechnol. 2015, 6, 1904–1926, doi:10.3762/bjnano.6.194

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Figure 1: Schematic representation of the FEBID process (reproduced with permission from [2], Copyright (2008) A...

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Figure 2: Schematic representation of elastic and inelastic scattering of high-energy primary electrons impin...

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Figure 3: Experimentally measured SE spectra from Ni(111) [6] irradiated by PEs with 400 eV impact energy (black...

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Figure 4: Simplified two-dimensional potential energy diagram for quasi-diatomic dissociation through electro...

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Figure 5: Simplified two-dimensional potential energy diagram for a quasi-diatomic dissociation through elect...

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Figure 6: Simplified two-dimensional potential energy diagram for a quasi-diatomic dissociation through elect...

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Figure 7: Energy-dependent relative cross sections (ion yields) of negative ion fragments produced by DEA to ...

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Figure 8: Positive ion mass spectrum of MeCpPtMe₃ recorded with electron energy of 100 eV (reproduced with pe...

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Figure 9: Positive ion mass spectra of MeCpPtMe₃ in the m/z range of 0–85 (reproduced with permission from Wn...

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Figure 10: Changes in the C/Pt ratio of a 3.16 nm thick film of MeCpPtMe₃ adsorbed on a gold surface at 180 K ...

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Figure 11: a) A line of best fit to the cross section for methane desorption from MeCpPtMe₃ adsorbed on a gold...

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Figure 12: Energy-dependent absolute cross sections for negative ion fragments produced by DEA to Pt(PF₃)₄ (re...

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Figure 13: Electron ionization FT-ICR mass spectrum of Pt(PF₃)₄ recorded at 20 eV incident electron energy (re...

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Figure 14: (a) Electron energy loss spectra of Pt(PF₃)₄ recorded at 0° angle with varying residual energies. T...

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Figure 15: Time-resolved mass spectra of gas phase PF₃ (positive [PF₂]⁺ ions produced by 70 eV electron impact...

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Figure 16: Electron dose dependence of the fractional coverage of Phosphorous (P/P_D=0), Fluorine (F/F_D=0) and ...

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Figure 17: Energy-dependent absolute DEA cross sections for Co(CO)₃NO (reproduced with permission from [10], Copyr...

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Figure 18: Energy dependence of the partial cross sections for positive ion fragments formed from Co(CO)₃NO (r...

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Figure 19: The partial cross sections for single CO loss through DEA (red solid line), for single CO loss thro...

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Figure 20: Predicted relative effective damage yield for single CO loss through DEA (red solid line), for sing...

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Figure 21: Positive ion (DI) mass spectra of (a) gas phase Co(CO)₃NO, (b) volatile species desorbing from a 2....

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Figure 22: Electron dose dependence of the fractional coverage of carbon, oxygen and nitrogen from Co(CO)₃NO a...

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Review

Published 16 Sep 2015

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Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Electron beam-induced deposition of platinum from Pt(CO)₂Cl₂ and Pt(CO)₂Br₂